US Patent Issued to Tokyo Electron on May 12 for "Measuring method, measuring system, and measuring device" (Japanese Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,624,969, issued on May 12, was assigned to Tokyo Electron Ltd. (Tokyo).

"Measuring method, measuring system, and measuring device" was invented by Kimihiro Yokoyama (Miyagi, Japan), Takayuki Hatanaka (Miyagi, Japan) and Ryoma Kobayashi (Miyagi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is a method for measuring a deviation amount of a measuring device, comprising: transferring, by using a transfer device, the measuring device to a position in an area specified by transfer position data; acquiring measurement values using four or more sensor electrodes of the measuring device; identifying two or more sensor electrodes among the four or mo...