ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,762, issued on March 24, was assigned to Tokyo Electron Ltd. (Tokyo).
"Filter circuit" was invented by Yohei Yamazawa (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a filter circuit provided in a plasma processing device for processing a substrate using plasma generated using power of a first frequency of 4 MHz or more and power of a second frequency of 100 Hz or more and less than 4 MHz. The filter circuit comprises: a first filter provided in a wiring between a conductive member provided in the plasma processing device and a power supply configured to supply power of a third frequency of less than 100 Hz or contro...