US Patent Issued to Tokyo Electron on June 2 for "Method of transporting workpiece and processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., June 2 -- United States Patent no. 12,643,185, issued on June 2, was assigned to Tokyo Electron Ltd. (Tokyo).

"Method of transporting workpiece and processing apparatus" was invented by Kiyoshi Mori (Tokyo) and Haruhiko Furuya (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of transporting a workpiece includes steps of: (a) adjusting an inclination of a stage including a placement surface on which the workpiece is to be placed such that the placement surface is inclined with respect to a horizontal plane; (b) receiving the workpiece from a transport apparatus configured to transport the workpiece by raising lift pins provided in the stage, before or after step (a); ...