US Patent Issued to Tokyo Electron on July 21 for "Substrate holder, substrate processing system, and substrate transfer method" (Japanese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,414, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo).

"Substrate holder, substrate processing system, and substrate transfer method" was invented by Yukiyoshi Saito (Koshi City, Japan), Keita Hirase (Koshi City, Japan) and Keisuke Sasaki (Koshi City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate holder includes a main body having a first arm and a second arm whose leading ends are spaced apart from each other and whose base ends are connected to each other; a first holding guide fixed to the leading end of the first arm, and configured to hold a periphery of the substrate; and a second holding guide fixed to the lea...