US Patent Issued to Tokyo Electron on July 21 for "Measuring device, measuring method, and vacuum processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,013, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo).

"Measuring device, measuring method, and vacuum processing apparatus" was invented by Atsushi Sawachi (Miyagi, Japan), Ichiro Sone (Miyagi, Japan), Takuya Nishijima (Miyagi, Japan) and Suguru Sato (Miyagi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A measuring device for a vacuum processing apparatus including a processing chamber having a first gate for loading and unloading a substrate and a second gate different from the first gate is provided. The measuring device includes a case having an opening that is sized to correspond to the second gate of the processing chambe...