US Patent Issued to Tokyo Electron on July 15 for "Cup, liquid processing apparatus, and liquid processing method" (Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,358,016, issued on July 15, was assigned to Tokyo Electron Ltd. (Tokyo).

"Cup, liquid processing apparatus, and liquid processing method" was invented by Ryunosuke Higashi (Koshi, Japan), Kenji Yada (Koshi, Japan), Yoshihiro Imura (Koshi, Japan), Kohei Kawakami (Koshi, Japan) and Yuhei Maeda (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cup includes a flow passage forming member forming a first exhaust passage, a scattered substance collection passage configured to collect a scattered substance from a substrate, and a second exhaust passage in sequence as going upwards; a joint exhaust passage connected to each of the first exhaust pass...