ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,800, issued on Jan. 27, was assigned to Tokyo Electron Ltd. (Tokyo).
"Pre-coating method and processing apparatus" was invented by Ryota Ifuku (Nirasaki, Japan), Takashi Matsumoto (Nirasaki, Japan), Masahito Sugiura (Nirasaki, Japan) and Makoto Wada (Nirasaki, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of pre-coating a carbon film by plasma in a processing container, includes: pre-coating an inner wall of the processing container with a first carbon film by plasma of a first carbon-containing gas under a first pressure; and processing the first carbon film with the plasma under a second pressure."
The patent was filed on April 16...