US Patent Issued to Tokyo Electron on Feb. 17 for "System and method to measure ion properties in a plasma system" (Texas Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,756, issued on Feb. 17, was assigned to Tokyo Electron Ltd. (Tokyo).

"System and method to measure ion properties in a plasma system" was invented by Zhiying Chen (Austin, Texas), Megan Carruth (Austin, Texas), Joel Blakeney (Austin, Texas), Shyam Sridhar (Austin, Texas) and Peter Lowell George Ventzek (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A detector for a plasma measurement system, where the detector includes an insulating substrate including a cavity; a conductive plate spanning an entrance to the cavity; a first aperture through the conductive plate; an iris diaphragm including movable blades around a second aperture, the ...