ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,585, issued on Feb. 17, was assigned to Tokyo Electron Ltd. (Tokyo).
"Processing system and transfer method" was invented by Norihiko Amikura (Miyagi, Japan) and Masatomo Kita (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing system includes: a chamber in which a consumable member is installed; a storage module configured to store the consumable member; a position detection sensor configured to detect a position of the consumable member; a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber ...