US Patent Issued to Tokyo Electron on Dec. 30 for "Temperature control device, temperature control method, and inspection apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,345, issued on Dec. 30, was assigned to Tokyo Electron Ltd. (Tokyo).

"Temperature control device, temperature control method, and inspection apparatus" was invented by Shigeru Kasai (Yamanashi, Japan) and Masahito Kobayashi (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "This temperature control device for controlling the temperature of an object that is subject to temperature control is provided with: a heating mechanism which has a heat source for heating said object subject to temperature control; a temperature measuring instrument for measuring the peripheral temperature of said object subject to temperature control; a temperatu...