US Patent Issued to Tokyo Electron on Dec. 2 for "Ignition controlling method, film forming method, and film forming apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,961, issued on Dec. 2, was assigned to Tokyo Electron Ltd. (Tokyo).

"Ignition controlling method, film forming method, and film forming apparatus" was invented by Takeshi Kobayashi (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ignition controlling method is performed in a film forming apparatus including: a processing container that accommodates a substrate; a plasma box formed on the processing container; a pair of electrodes arranged to sandwich the plasma box therebetween; and an RF power supply connected to the pair of electrodes via a matching box including a variable capacitor. The ignition controlling method includes: storing...