US Patent Issued to Tokyo Electron on Dec. 2 for "Film forming apparatus and method of controlling film forming apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,970, issued on Dec. 2, was assigned to Tokyo Electron Ltd. (Tokyo).

"Film forming apparatus and method of controlling film forming apparatus" was invented by Yasuhiko Kojima (Yamanashi, Japan), Shota Ishibashi (Yamanashi, Japan) and Toru Kitada (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is a film forming apparatus comprising: a first holder holding a first target formed of a first material; a second holder holding a second target formed of a second material different from the first material; and a mounting table holding a substrate, the mounting table rotatable with a central axis of the mounting table as a rotation axis, ...