US Patent Issued to Tokyo Electron on Dec. 16 for "Process estimation system, process data estimation method, and recording medium" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,498,276, issued on Dec. 16, was assigned to Tokyo Electron Ltd. (Tokyo).

"Process estimation system, process data estimation method, and recording medium" was invented by Naoshige Fushimi (Nirasaki, Japan) and Hidefumi Matsui (Nirasaki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a process estimation system and a process data estimation method for appropriately estimating process data, and a program. The process estimation system includes: an input part configured to input actual sensor data detected by a sensor of a substrate processing apparatus; a virtual sensor data generation part configured to generate virtual sensor data for...