ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,171, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo).
"Parallel resonance antenna for radial plasma control" was invented by Chelsea DuBose (Austin, Texas), Barton Lane (Austin, Texas), Merritt Funk (Austin, Texas) and Justin Moses (Austin, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "According to an embodiment, a radiating structure of a resonating structure used for plasma processing is disclosed. The radiating structure includes a set of first arms and a set of second arms. Each first arm has a first inductance and is coupled to a respective first capacitor and a respective second capacitor of the resonating structure to fo...