US Patent Issued to Tokyo Electron on Aug. 25 for "Conveyance method and processing system" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,095, issued on Aug. 25, was assigned to Tokyo Electron Ltd. (Tokyo).

"Conveyance method and processing system" was invented by Wataru Nakagomi (Nirasaki City, Japan), Shotaro Murakawa (Nirasaki City, Japan), Naoyuki Sato (Nirasaki City, Japan), Fumitaka Sento (Nirasaki City, Japan), Tatsuya Mukoyama (Nirasaki City, Japan), Shigeru Kubota (Nirasaki City, Japan) and Keisuke Hiraide (Nirasaki City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "This method is for conveying, in a processing system comprising at least one processing unit that performs a desired process on substrates and a conveyance unit that conveys the substrates to the processin...