US Patent Issued to Tokyo Electron on April 21 for "Substrate transfer apparatus, state determination method, and computer storage medium" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,610,783, issued on April 21, was assigned to Tokyo Electron Ltd. (Tokyo).

"Substrate transfer apparatus, state determination method, and computer storage medium" was invented by Ryo Araki (Koshi, Japan), Junnosuke Maki (Koshi, Japan), Mitsuteru Yano (Koshi, Japan) and Masato Hayashi (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus transfers a substrate. The apparatus includes: one substrate holder adsorbing and holding the substrate via an adsorption port; a nozzle being provided on a surface of the one substrate holder and allowing gas to pass therethrough; an adsorption flow path being connected to the adsorption port and all...