US Patent Issued to TOCALO, FUJIMI on Nov. 3 for "Thermal spray material, thermal spray coating, method for forming thermal spray coating, and component for plasma etching device" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,781,332, issued on Nov. 3, was assigned to TOCALO Co. LTD. (Kobe, Japan) and FUJIMI Inc. (Kiyosu, Japan).

"Thermal spray material, thermal spray coating, method for forming thermal spray coating, and component for plasma etching device" was invented by Yasuhiro Shiojiri (Akashi, Japan), Tatsuo Suidzu (Akashi, Japan), Kensuke Taguchi (Akashi, Japan), Hiroaki Mizuno (Kiyosu, Japan) and Takaya Masuda (Kiyosu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which ca...