US Patent Issued to The Board of Trustees of the Leland Stanford Junior University on Aug. 18 for "Structured microchannel cooling technology by utilizing a novel hard mask pattern transfer fabrication process" (California Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,713,914, issued on Aug. 18, was assigned to The Board of Trustees of the Leland Stanford Junior University (Stanford, Calif.).

"Structured microchannel cooling technology by utilizing a novel hard mask pattern transfer fabrication process" was invented by Sougata Hazra (Stanford, Calif.), Mehdi Asheghi (Oakland, Calif.) and Kenneth E. Goodson (Portola Valley, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Improved microchannel structures are provided using monolithic structures having deep features (less than=150 um) and two or more different feature heights above the substrate. Exemplary channel structures that are enabled by this approach inclu...