ALEXANDRIA, Va., March 31 -- United States Patent no. 12,591,133, issued on March 31, was assigned to Teknologian tutkimuskeskus VTT Oy (Espoo, Finland).
"Enhanced microelectromechanical system mirror apparatus" was invented by Dmitry Morits (Espoo, Finland) and Jukka Kyynarainen (Espoo, Finland).
According to the abstract* released by the U.S. Patent & Trademark Office: "According to an example aspect of the present invention, there is provided a Microelectrical System, MEMS, mirror apparatus, comprising a MEMS mirror, at least two pairs of actuation units, wherein each pair comprises a first and a second actuation unit and a first actuation unit of a first pair of actuation units comprises a stress relief unit, an inner actuator and an ...