US Patent Issued to Taiwan Semiconductor Manufacturing on Sept. 8 for "Normally-open piezoelectric MEMS valve" (Taiwanese Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,729,781, issued on Sept. 8, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Normally-open piezoelectric MEMS valve" was invented by Yi-Hsien Chang (Shetou Township, Taiwan), Fu-Chun Huang (Zhubei City, Taiwan), Po-Chen Yeh (New Taipei City, Taiwan), Ching-Hui Lin (Taichung City, Taiwan), Chao-Hung Chu (Keelung City, Taiwan), Chun-Ren Cheng (Hsin-Chu City, Taiwan) and Shih-Fen Huang (Jhubei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments of the present disclosure are directed to a normally-open piezoelectric microelectromechanical systems (MEMS) device. A cantilever has a first end overlying and ...