ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,766,648, issued on Oct. 20, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd. (Hsin-Chu, Taiwan).
"Device maintenance in semiconductor manufacturing environment" was invented by Vincent Chien (New Taipei City, Taiwan), Shih Yi-Cheng (Zhubei City, Taiwan) and Hill Liao (Hsinchu City, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semi...