US Patent Issued to Taiwan Semiconductor Manufacturing on May 13 for "Semiconductor processing tool and methods of operation" (Taiwanese Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,672, issued on May 13, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor processing tool and methods of operation" was invented by Kai-Chieh Chang (Changhua, Taiwan), Kai-Fa Ho (New Taipei, Taiwan), Li-Jui Chen (Hsinchu, Taiwan) and Heng-Hsin Liu (New Taipei, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some implementations described herein provide an exposure tool and associated methods of operation in which a scanner control system generates a scanner route for an exposure recipe such that the distance traveled by a substrate stage of the exposure tool along the scanner route is reduced and/or o...