ALEXANDRIA, Va., March 31 -- United States Patent no. 12,589,465, issued on March 31, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Platen rotation device" was invented by Bruce Cho (Hsinchu, Taiwan), Chia-Ying Tien (Hsinchu, Taiwan) and Huang-Chu Ko (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes controlling a rotational kinetic energy of a rotor assembly of a wafer-platen, wherein a rotational velocity of the wafer-platen is either increased or decreased. The method further includes generating an electrical energy output of the wafer-platen based on decreased rotational kinetic energy of the wafer-platen. The method further includes st...