US Patent Issued to Taiwan Semiconductor Manufacturing on March 17 for "Phase-change material (PCM) radio frequency (RF) switching device with thin self-aligned dielectric layer" (Taiwanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,871, issued on March 17, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Phase-change material (PCM) radio frequency (RF) switching device with thin self-aligned dielectric layer" was invented by Kuo-Pin Chang (Hsinchu, Taiwan), Hung-Ju Li (Hsinchu, Taiwan), Yu-Wei Ting (Taipei, Taiwan) and Kuo-Ching Huang (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A phase-change material (PCM) switching device is provided. The PCM switching device includes: a base dielectric layer over a semiconductor substrate; a heater element embedded in the base dielectric layer, the heater element comprising a first metal e...