ALEXANDRIA, Va., July 7 -- United States Patent no. 12,675,866, issued on July 7, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsin-Chu, Taiwan).
"Method and apparatus for inspecting a wafer" was invented by Yi-Hsi Chen (Hsin-Chu, Taiwan), Cheng-Hung Chen (Hsinchu County, Taiwan), Chia Han Wu (Hsinchu County, Taiwan), Yen-Chia Liu (Tainan City, Taiwan) and Hsu-Shui Liu (Pingjhen City, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes generating coherent light that has a wavefront, shaping the wavefront of the coherent light to provide the coherent light with a shaped wavefront, directing a probe beam of the coherent light with the shaped wavefront to an inspection surfac...