US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on July 28 for "Resist pump buffer tank and method of resist defect reduction" (Taiwanese Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,596, issued on July 28, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Resist pump buffer tank and method of resist defect reduction" was invented by Chen Yi Hsu (Zhubei City, Taiwan), Shang-Sheng Li (Zhubei City, Taiwan) and Yung-Yao Lee (Zhubei City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A resist material dispensing system includes a resist supply and a resist filter connected to the resist supply downstream from the resist supply. The resist material dispensing system includes a resist tank structure connected to the resist filter downstream from the resist filter and a resist pump device conne...