US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on July 21 for "Apparatus with heated filter and operation method of the same" (Taiwanese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,011, issued on July 21, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Apparatus with heated filter and operation method of the same" was invented by Chih-Lun Lu (Hsinchu, Taiwan), Chen-Wei Pan (Hsinchu, Taiwan) and Chih-Teng Liao (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes a process chamber, a vacuum pump disposed downstream of the process chamber for discharging a fluid flow from the process chamber, a filter mounted between the process chamber and the vacuum pump for filtering the fluid flow, and a heating device disposed to heat the filter."

The patent was filed on A...