ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,744, issued on Jan. 27, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Wafer transportation" was invented by Chieh Hsu (Hsinchu, Taiwan), Guancyun Li (Miaoli county, Taiwan), Ching-Jung Chang (Taichung, Taiwan) and Chi-Feng Tung (Miaoli County, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "System and method for cross-fab wafer transportation are provided. An exemplary system includes a first control unit coupled to an associated first automatic material handling system (AMHS), the first AMHS includes a first overhead transport (OHT) track comprising a first portion and a first vehicle movable along the fi...