ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,358, issued on Jan. 27, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Semiconductor device structure with movable membrane" was invented by Yi-Chuan Teng (Zhubei, Taiwan), Chun-Yin Tsai (Hsinchu, Taiwan), Chia-Hua Chu (Zhubei, Taiwan) and Chun-Wen Cheng (Zhubei, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a dielectric layer formed over the substrate. The semiconductor device structure further includes a movable membrane formed over the dielectric layer. In addit...