ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,306, issued on Feb. 17, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Convex shape trench in RDL for stress relaxation" was invented by Chia-Nan Lin (Chiayi, Taiwan), Yen-Cheng Lin (Taipei, Taiwan) and Jiann-Horng Lin (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes: providing a passivation layer with an embedded MIM capacitor; forming a redistribution layer (RDL) above the passivation layer; and forming an opening in the RDL above the MIM capacitor, wherein the opening separates the RDL into first and second RDL structures, wherein each of the first and second RDL structures has...