US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Dec. 23 for "System for monitoring wafer carrier and method of manufacturing semiconductor structure" (Taiwanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,504,391, issued on Dec. 23, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"System for monitoring wafer carrier and method of manufacturing semiconductor structure" was invented by Hsu Tung Yen (Kaohsiung, Taiwan), Ling-Sung Wang (Tainan, Taiwan), Chen-Chieh Chiang (Kaohsiung, Taiwan) and Bo Hsiang Huang (Tainan, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system for monitoring a wafer carrier includes an overhead hoist transport (OHT) vehicle, a scanner, and a processer. The OHT vehicle is configured to transport the wafer carrier along a vertical direction. The scanner is disposed below the OHT vehicle, ...