US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on April 14 for "Deposition equipment with adjustable temperature source" (Taiwanese Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,604,679, issued on April 14, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Deposition equipment with adjustable temperature source" was invented by Chih Yung Hung (Hsinchu, Taiwan), Wei-Jen Lo (Hsinchu County, Taiwan), Cheng-Han Lee (New Taipei City, Taiwan), Ching-Lun Lai (Taichung City, Taiwan), Chien-Feng Lin (Hsinchu County, Taiwan), Shahaji B. More (Hsinchu City, Taiwan) and Shih-Chieh Chang (Taipei City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a semiconductor processing apparatus according to one embodiment. The semiconductor processing apparatus includes a chambe...