ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,912, issued on March 17, was assigned to Sumitomo Osaka Cement Co. Ltd. (Tokyo).
"Electrostatic chuck device" was invented by Yuki Kinpara (Tokyo), Taku Ichiyoshi (Tokyo), Satoyoshi Inui (Tokyo) and Toru Sugamata (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck device comprising: a plate-shaped electrostatic chuck part which has an electrostatic adsorption electrode provided therein and has a mounting surface on which a plate-shaped sample is mounted; and a base part which supports the electrostatic chuck part on a support surface thereof from an opposite side of the mounting surface, wherein the base part has a disk sha...