US Patent Issued to SUMCO on Aug. 26 for "Carrier measurement device, carrier measurement method, and carrier management method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,398,992, issued on Aug. 26, was assigned to SUMCO Corp. (Tokyo).

"Carrier measurement device, carrier measurement method, and carrier management method" was invented by Hiroshi Takai (Tokyo), Takeshi Kuroiwa (Tokyo) and Ryosuke Kido (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A carrier measuring device includes a rotary table, a table drive motor, an upper thickness sensor, a lower thickness sensor and a slide unit. The rotary table includes a carrier receiver configured to horizontally house a carrier formed with a hole in which a semiconductor wafer is held, the hole being eccentric with respect to the carrier. The table drive motor rotates ...