ALEXANDRIA, Va., May 5 -- United States Patent no. 12,619,065, issued on May 5, was assigned to STMicroelectronics S.r.l. (Agrate Brianza, Italy).
"Process for manufacturing a microelectromechanical mirror device and microelectromechanical mirror device" was invented by Roberto Carminati (Piancogno, Italy), Nicolo' Boni (Mountain View, Calif.), Irene Martini (Bergamo, Italy), Massimiliano Merli (Stradella, Italy) and Laura Oggioni (Milan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A process for manufacturing a microelectromechanical mirror device includes, in a semiconductor wafer, defining a support frame, a plate connected to the support frame so as to be orientable around at least one rotation axis, an...