US Patent Issued to STMicroelectronics on Feb. 3 for "Process for manufacturing an optical microelectromechanical device having a tiltable structure with an antireflective surface" (Italian, American Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,070, issued on Feb. 3, was assigned to STMicroelectronics S.r.l. (Agrate Brianza, Italy).

"Process for manufacturing an optical microelectromechanical device having a tiltable structure with an antireflective surface" was invented by Luca Seghizzi (Milan), Nicolo' Boni (Mountain View, Calif.), Laura Oggioni (Milan), Roberto Carminati (Piancogno, Italy) and Marta Carminati (Casatenovo, Italy).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing an optical microelectromechanical device, includes forming, in a first wafer of semiconductor material having a first surface and a second surface, a suspended mirror structure, a fixed stru...