ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,787,647, issued on Nov. 3, was assigned to STANLEY ELECTRIC Co. LTD. (Tokyo).
"Piezoelectric element and method for manufacturing piezoelectric element" was invented by Haruki Tanaka (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A piezoelectric element includes: a Pt film for a lower electrode provided on a plane of a Si substrate; a PZT film provided on the Pt film; and a Pt film for an upper electrode provided on the PZT film. The PZT film includes a perpendicularly oriented part having a c-axis in a direction perpendicular to the Pt film, and an obliquely oriented part having a c-axis inclined with respect to the c-axis of the perpendicularly ...