ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,465, issued on Dec. 9, was assigned to SPTS Technologies Ltd. (Newport, Great Britain).
"PVD apparatus and method" was invented by Kyle Hutchings (Newport, Great Britain), Tony Wilby (Newport, Great Britain), Ian Moncrieff (Newport, Great Britain), Rhonda Hyndman (Newport, Great Britain) and Stephen Burgess (Newport, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "A Physical Vapour Deposition (PVD) apparatus having a PVD chamber, a target, a substrate support in the PVD chamber comprising an upper rotatable portion having an upper surface on which a substrate can be supported and a lower stationary portion, an RF source configured to sup...