ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,969, issued on Dec. 2, was assigned to SPTS Technologies Ltd. (Newport, Great Britain).
"Deposition apparatus" was invented by Rhonda Hyndman (Newport, Great Britain) and Steve Burgess (Ebbw Vale, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "A magnetron sputtering apparatus for depositing material onto a substrate, comprises: a chamber comprising a substrate support and a target; a plasma production device configured to produce a plasma within the chamber suitable for sputtering material from the target onto the substrate; and a thermally conductive grid comprising a plurality of cells. Each cell comprises an aperture and the ratio of...