ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,414, issued on May 19, was assigned to Skyworks Solutions Inc. (Irvine, Calif.).
"Method of manufacturing a cantilever sensor" was invented by You Qian (Singapore), Rakesh Kumar (Singapore) and Guofeng Chen (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for making a cantilever sensor includes forming a beam extending between a proximal portion and a distal end, and forming and attaching an electrode on the proximal portion. The beam is attached to a substrate in cantilever form so that the proximal portion of the beam is anchored to the substrate and the distal end of the beam is unsupported. The method includes modifying th...