ALEXANDRIA, Va., April 15 -- United States Patent no. 12,604,681, issued on April 14, was assigned to SK hynix Inc. (Incheon, South Korea) and INCHEON NATIONAL UNIVERSITY RESEARCH & BUSINESS FOUNDATION (Incheon, South Korea).
"Thin film deposition method and manufacturing method of electronic device applying the same" was invented by Do Han Lee (Icheon, South Korea), Eun Soo Kim (Icheon, South Korea), Seung Wook Ryu (Icheon, South Korea), Sung Hwan Jo (Icheon, South Korea), Han-Bo-Ram Lee (Incheon, South Korea), Abu Saad Aqueel Ahmad Ansari (Incheon, South Korea) and Ngoc Le Trinh (Incheon, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A thin film deposition method may include preparing a substr...