ALEXANDRIA, Va., March 3 -- United States Patent no. 12,568,789, issued on March 3, was assigned to Sinfonia Technology Co. Ltd. (Tokyo).
"Equipment front end module" was invented by Gengoro Ogura (Tokyo) and Toshihiro Kawai (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An EFEM includes a housing including a transfer chamber in which a processing target object is transferred, and a connection module provided between the transfer chamber and a front chamber, wherein the housing includes a rear member having a housing-side opening through which the processing target object is capable of passing, the connection module includes a first frame part arranged around the housing-side opening and pressed by a ...