ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,625, issued on July 7, was assigned to SINFONIA TECHNOLOGY Co. LTD. (Tokyo).
"Transfer chamber" was invented by Toshihiro Kawai (Tokyo), Takashi Shigeta (Tokyo), Munekazu Komiya (Tokyo) and Yasushi Taniyama (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "The EFEM comprises: a transfer chamber in which a transfer robot is disposed, a first fan that forms a downward air flow in the transfer chamber, a gas return space that circulates the gas flowing downward in the transfer chamber above the first fan, a box that communicates with the transfer chamber and is provided with a gas outlet, and a connecting and disconnecting means configured to switch...