ALEXANDRIA, Va., April 15 -- United States Patent no. 12,604,695, issued on April 14, was assigned to Sinfonia Technology Co. Ltd. (Tokyo).
"EFEM" was invented by Toshihiro Kawai (Tokyo) and Gengoro Ogura (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An EFEM is provided with a circulation path including a substrate transfer space formed inside a housing and a return path configured to return gas flowing from one side to the other side of the substrate transfer space, the EFEM including: a partition wall configured to separate the substrate transfer space and the return path; a capture part provided in the return path having a higher pressure than the substrate transfer space in a state in which the g...