US Patent Issued to SEMES on Sept. 8 for "Nozzle inspection unit and substrate treatment apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,731,243, issued on Sept. 8, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Nozzle inspection unit and substrate treatment apparatus including the same" was invented by Myeong Jun Lim (Gyeonggi-do, South Korea), Kwang Sup Kim (Chungcheongnam-do, South Korea), Yeon Chul Song (Seoul, South Korea), Ji Hoon Yoo (Gyeonggi-do, South Korea), Jong Min Lee (Gyeonggi-do, South Korea), Jun Ho Oh (Gyeonggi-do, South Korea) and Young Ho Park (Incheon, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a nozzle inspection unit configured to generate a large amount of defect data to improve detection accuracy of a defective nozzl...