US Patent Issued to SEMES on Sept. 29 for "Substrate processing module and laser beam providing method" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,749,663, issued on Sept. 29, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Substrate processing module and laser beam providing method" was invented by Kwang Ryul Kim (Suwon-si, South Korea) and Yunsang Kim (Seongnam-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a substrate processing module including a plurality of substrate processing apparatuses each including a process chamber having a processing space therein, a support unit for supporting a substrate in the processing space, a gas supply unit for supplying a process gas into the processing space, a plasma source for forming plasma from the process gas sup...