US Patent Issued to SEMES on Sept. 29 for "Storage and transfer module and substrate treatment apparatus including storage and transfer module" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,748,355, issued on Sept. 29, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Storage and transfer module and substrate treatment apparatus including storage and transfer module" was invented by Ki Won Han (Anseong-si, South Korea), Doo Hyun Baek (Hwaseong-si, South Korea), Hee Chan Kim (Hwaseong-si, South Korea), Tae Kyung Kong (Cheonan-si, South Korea) and Dong Kyum Kim (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A storage and transfer module includes a module body, a storage and transfer unit disposed in the module body, the storage and transfer unit including a liftable transfer portion, and a storage po...