US Patent Issued to SEMES on Sept. 29 for "Focus ring unit and substrate processing apparatus" (South Korean Inventor)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,749,659, issued on Sept. 29, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Focus ring unit and substrate processing apparatus" was invented by Su Ryong Bang (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A focus ring capable of evaluating a plurality of focus ring shapes is provided. A focus ring unit, as a focus ring used in a substrate processing device includes a plurality of parts with different conditions of an exposed surface facing a plasma space in a circumferential direction."

The patent was filed on Feb. 3, 2023, under Application No. 18/105,274.

*For further information, including images,...