US Patent Issued to SEMES on Sept. 16 for "Plasma processing apparatus and plasma processing method using the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,417,897, issued on Sept. 16, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Plasma processing apparatus and plasma processing method using the same" was invented by Yoon Seok Choi (Gyeonggi-do, South Korea), Soon Cheon Cho (Gyeonggi-do, South Korea), Sang Jeong Lee (Gyeonggi-do, South Korea), Hyun Woo Jo (Gyeonggi-do, South Korea) and Jong Won Park (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma processing apparatus is provided. The plasma processing apparatus includes a chamber having a processing space defined therein in which plasma is generated; and a plasma generation unit configured to excite g...