ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,769,294, issued on Oct. 20, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Autonomous mobile robot and semiconductor manufacturing equipment including the same" was invented by Hoyoung Lee (Yongin-si, South Korea), Seungchan Lee (Hwaseong-si, South Korea) and Sang Ok Park (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an autonomous mobile robot (AMR) and semiconductor manufacturing equipment including the same, the AMR including an autonomous mobile module capable of autonomously moving along a certain autonomous motion path between a plurality of semiconductor manufacturing apparatuses disposed in semic...